Fabrication and characterization of ISFET for PH measurements

We have successfully fabricated, assembled and characterized the ISFET devices for pH measurement. After electrical measurement on wafer-level to confine the wafer fabrication process, the fabricated wafer was cut into individual ISFET dice. The ISFET dice was then mounted on printing circuit board...

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Main Author: Jiang, Chao
Other Authors: School of Electrical and Electronic Engineering
Format: Theses and Dissertations
Published: 2008
Subjects:
Online Access:http://hdl.handle.net/10356/4437
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Institution: Nanyang Technological University
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spelling sg-ntu-dr.10356-44372023-07-04T15:02:59Z Fabrication and characterization of ISFET for PH measurements Jiang, Chao School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering::Microelectronics We have successfully fabricated, assembled and characterized the ISFET devices for pH measurement. After electrical measurement on wafer-level to confine the wafer fabrication process, the fabricated wafer was cut into individual ISFET dice. The ISFET dice was then mounted on printing circuit board (PCB). Master of Science (Microelectronics) 2008-09-17T09:51:27Z 2008-09-17T09:51:27Z 2003 2003 Thesis http://hdl.handle.net/10356/4437 Nanyang Technological University application/pdf
institution Nanyang Technological University
building NTU Library
continent Asia
country Singapore
Singapore
content_provider NTU Library
collection DR-NTU
topic DRNTU::Engineering::Electrical and electronic engineering::Microelectronics
spellingShingle DRNTU::Engineering::Electrical and electronic engineering::Microelectronics
Jiang, Chao
Fabrication and characterization of ISFET for PH measurements
description We have successfully fabricated, assembled and characterized the ISFET devices for pH measurement. After electrical measurement on wafer-level to confine the wafer fabrication process, the fabricated wafer was cut into individual ISFET dice. The ISFET dice was then mounted on printing circuit board (PCB).
author2 School of Electrical and Electronic Engineering
author_facet School of Electrical and Electronic Engineering
Jiang, Chao
format Theses and Dissertations
author Jiang, Chao
author_sort Jiang, Chao
title Fabrication and characterization of ISFET for PH measurements
title_short Fabrication and characterization of ISFET for PH measurements
title_full Fabrication and characterization of ISFET for PH measurements
title_fullStr Fabrication and characterization of ISFET for PH measurements
title_full_unstemmed Fabrication and characterization of ISFET for PH measurements
title_sort fabrication and characterization of isfet for ph measurements
publishDate 2008
url http://hdl.handle.net/10356/4437
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