Fabrication and characterization of ISFET for PH measurements
We have successfully fabricated, assembled and characterized the ISFET devices for pH measurement. After electrical measurement on wafer-level to confine the wafer fabrication process, the fabricated wafer was cut into individual ISFET dice. The ISFET dice was then mounted on printing circuit board...
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Format: | Theses and Dissertations |
Published: |
2008
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Online Access: | http://hdl.handle.net/10356/4437 |
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Institution: | Nanyang Technological University |
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