Fabrication and characterization of ISFET for PH measurements

• Main Author: Jiang, Chao
• Other Authors: School of Electrical and Electronic Engineering
• Format: Theses and Dissertations
• Published: 2008
• Subjects: DRNTU::Engineering::Electrical and electronic engineering::Microelectronics
• Online Access: http://hdl.handle.net/10356/4437
• Institution: Nanyang Technological University

We have successfully fabricated, assembled and characterized the ISFET devices for pH measurement. After electrical measurement on wafer-level to confine the wafer fabrication process, the fabricated wafer was cut into individual ISFET dice. The ISFET dice was then mounted on printing circuit board...