Fabrication and properties of amorphous and textured carbon film

• Main Author: Thong, Kar Wui
• Other Authors: Tay Beng Kang
• Format: Final Year Project
• Language: English
• Published: 2011
• Subjects: DRNTU::Engineering::Electrical and electronic engineering
• Online Access: http://hdl.handle.net/10356/45227
• Institution: Nanyang Technological University

The effect of deposition parameters on the microstructures of amorphous carbon film is studied. It was shown that the sp2 fraction in amorphous carbon depends on the substrate bias voltage. Increasing substrate bias voltage results in decreasing G peak position in Raman spectra which implies sp2 fraction in amorphous carbon film is increasing while the film is becoming more amorphous from ta-C to a-C. On the other hand, the effect of carbon film thickness on electron field emission of amorphous and textured carbon films has been studied. It was found that the threshold electric field of field emission has no strong dependence on the film thickness of amorphous carbon. It was shown that the emission was example of “front surface model” where electrons are proposed to be emitted from sp2 sites at film surface layer. However for textured carbon film, the electron field emission is found to be depending on the carbon film thickness.