Fabrication and properties of amorphous and textured carbon film

• Main Author: Thong, Kar Wui
• Other Authors: Tay Beng Kang
• Format: Final Year Project
• Language: English
• Published: 2011
• Subjects: DRNTU::Engineering::Electrical and electronic engineering
• Online Access: http://hdl.handle.net/10356/45227
• Institution: Nanyang Technological University

The effect of deposition parameters on the microstructures of amorphous carbon film is studied. It was shown that the sp2 fraction in amorphous carbon depends on the substrate bias voltage. Increasing substrate bias voltage results in decreasing G peak position in Raman spectra which implies sp2 fra...