Study of elasto-polymer for supercritical CO2 wafer processing
Carbon dioxide (CO2) is one of the most common candidates of Supercritical Fluids (SCFs). It has a number of advantages, such as low human toxicity, no solvent waste, low cost, ready availability, complete recovery of extracted agents and extracted substances, environmental acceptability, complete a...
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| Format: | Theses and Dissertations |
| Published: |
2008
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| Online Access: | http://hdl.handle.net/10356/4533 |
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| Institution: | Nanyang Technological University |