Study of elasto-polymer for supercritical CO2 wafer processing

• Main Author: Kyaw, Aung.
• Other Authors: Tse Man Siu
• Format: Theses and Dissertations
• Published: 2008
• Subjects: DRNTU::Engineering::Electrical and electronic engineering::Electronic packaging
• Online Access: http://hdl.handle.net/10356/4533
• Institution: Nanyang Technological University

Carbon dioxide (CO2) is one of the most common candidates of Supercritical Fluids (SCFs). It has a number of advantages, such as low human toxicity, no solvent waste, low cost, ready availability, complete recovery of extracted agents and extracted substances, environmental acceptability, complete a...