Study of elasto-polymer for supercritical CO2 wafer processing

Study of elasto-polymer for supercritical CO2 wafer processing

Carbon dioxide (CO2) is one of the most common candidates of Supercritical Fluids (SCFs). It has a number of advantages, such as low human toxicity, no solvent waste, low cost, ready availability, complete recovery of extracted agents and extracted substances, environmental acceptability, complete a...

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Main Author: Kyaw, Aung.
Other Authors: Tse Man Siu
Format: Theses and Dissertations
Published: 2008
Subjects:
DRNTU::Engineering::Electrical and electronic engineering::Electronic packaging
Online Access:http://hdl.handle.net/10356/4533
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Institution: Nanyang Technological University
id sg-ntu-dr.10356-4533
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spelling sg-ntu-dr.10356-45332023-07-04T15:42:58Z Study of elasto-polymer for supercritical CO2 wafer processing Kyaw, Aung. Tse Man Siu School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering::Electronic packaging Carbon dioxide (CO2) is one of the most common candidates of Supercritical Fluids (SCFs). It has a number of advantages, such as low human toxicity, no solvent waste, low cost, ready availability, complete recovery of extracted agents and extracted substances, environmental acceptability, complete and ready recycling, etc. It has been widely studied as a cleaning solvent for many decades to replace large amounts of toxic chemicals and as replacement of water in semiconductor processes in recent year. Master of Science (Microelectronics) 2008-09-17T09:53:36Z 2008-09-17T09:53:36Z 2005 2005 Thesis http://hdl.handle.net/10356/4533 Nanyang Technological University application/pdf
institution Nanyang Technological University
building NTU Library
continent Asia
country Singapore
Singapore
content_provider NTU Library
collection DR-NTU
topic DRNTU::Engineering::Electrical and electronic engineering::Electronic packaging
spellingShingle DRNTU::Engineering::Electrical and electronic engineering::Electronic packaging
Kyaw, Aung.
Study of elasto-polymer for supercritical CO2 wafer processing
description Carbon dioxide (CO2) is one of the most common candidates of Supercritical Fluids (SCFs). It has a number of advantages, such as low human toxicity, no solvent waste, low cost, ready availability, complete recovery of extracted agents and extracted substances, environmental acceptability, complete and ready recycling, etc. It has been widely studied as a cleaning solvent for many decades to replace large amounts of toxic chemicals and as replacement of water in semiconductor processes in recent year.
author2 Tse Man Siu
author_facet Tse Man Siu
Kyaw, Aung.
format Theses and Dissertations
author Kyaw, Aung.
author_sort Kyaw, Aung.
title Study of elasto-polymer for supercritical CO2 wafer processing
title_short Study of elasto-polymer for supercritical CO2 wafer processing
title_full Study of elasto-polymer for supercritical CO2 wafer processing
title_fullStr Study of elasto-polymer for supercritical CO2 wafer processing
title_full_unstemmed Study of elasto-polymer for supercritical CO2 wafer processing
title_sort study of elasto-polymer for supercritical co2 wafer processing
publishDate 2008
url http://hdl.handle.net/10356/4533
_version_ 1772826864042115072

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