Low temperature polycrystalline silicon thin films and thin film transistors

Low temperature polycrystalline silicon thin films and thin film transistors

Low temperature polycrystalline silicon (LTPS) and LTPS thin film transistors (TFTs) have attracted great attention in recent years, with promising applications in flat panel displays as pixel addressing devices and circuit constructing components. High-quality LTPS films are necessary to achieve be...

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Bibliographic Details
Main Author: Li, Junfeng
Other Authors: Sun Xiaowei
Format: Theses and Dissertations
Published: 2008
Subjects:
DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials
DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
Online Access:https://hdl.handle.net/10356/4647
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Institution: Nanyang Technological University
Description
Summary:Low temperature polycrystalline silicon (LTPS) and LTPS thin film transistors (TFTs) have attracted great attention in recent years, with promising applications in flat panel displays as pixel addressing devices and circuit constructing components. High-quality LTPS films are necessary to achieve better device performance. Thermal crystallization techniques, including solid phase crystallization (SPC) and metal induced lateral crystallization (MILC) using nickel (Ni), are studied in this thesis.

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