Low temperature polycrystalline silicon thin films and thin film transistors

• Main Author: Li, Junfeng
• Other Authors: Sun Xiaowei
• Format: Theses and Dissertations
• Published: 2008
• Subjects: DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials; DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
• Online Access: https://hdl.handle.net/10356/4647
• Institution: Nanyang Technological University

Low temperature polycrystalline silicon (LTPS) and LTPS thin film transistors (TFTs) have attracted great attention in recent years, with promising applications in flat panel displays as pixel addressing devices and circuit constructing components. High-quality LTPS films are necessary to achieve be...