Low temperature polycrystalline silicon thin films and thin film transistors

Low temperature polycrystalline silicon thin films and thin film transistors

Low temperature polycrystalline silicon (LTPS) and LTPS thin film transistors (TFTs) have attracted great attention in recent years, with promising applications in flat panel displays as pixel addressing devices and circuit constructing components. High-quality LTPS films are necessary to achieve be...

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Main Author: Li, Junfeng
Other Authors: Sun Xiaowei
Format: Theses and Dissertations
Published: 2008
Subjects:
DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials
DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
Online Access:https://hdl.handle.net/10356/4647
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Institution: Nanyang Technological University
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spelling sg-ntu-dr.10356-46472023-07-04T16:59:52Z Low temperature polycrystalline silicon thin films and thin film transistors Li, Junfeng Sun Xiaowei School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films Low temperature polycrystalline silicon (LTPS) and LTPS thin film transistors (TFTs) have attracted great attention in recent years, with promising applications in flat panel displays as pixel addressing devices and circuit constructing components. High-quality LTPS films are necessary to achieve better device performance. Thermal crystallization techniques, including solid phase crystallization (SPC) and metal induced lateral crystallization (MILC) using nickel (Ni), are studied in this thesis. DOCTOR OF PHILOSOPHY (EEE) 2008-09-17T09:55:55Z 2008-09-17T09:55:55Z 2006 2006 Thesis Li, J. (2006). Low temperature polycrystalline silicon thin films and thin film transistors. Doctoral thesis, Nanyang Technological University, Singapore. https://hdl.handle.net/10356/4647 10.32657/10356/4647 Nanyang Technological University application/pdf
institution Nanyang Technological University
building NTU Library
continent Asia
country Singapore
Singapore
content_provider NTU Library
collection DR-NTU
topic DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials
DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
spellingShingle DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials
DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
Li, Junfeng
Low temperature polycrystalline silicon thin films and thin film transistors
description Low temperature polycrystalline silicon (LTPS) and LTPS thin film transistors (TFTs) have attracted great attention in recent years, with promising applications in flat panel displays as pixel addressing devices and circuit constructing components. High-quality LTPS films are necessary to achieve better device performance. Thermal crystallization techniques, including solid phase crystallization (SPC) and metal induced lateral crystallization (MILC) using nickel (Ni), are studied in this thesis.
author2 Sun Xiaowei
author_facet Sun Xiaowei
Li, Junfeng
format Theses and Dissertations
author Li, Junfeng
author_sort Li, Junfeng
title Low temperature polycrystalline silicon thin films and thin film transistors
title_short Low temperature polycrystalline silicon thin films and thin film transistors
title_full Low temperature polycrystalline silicon thin films and thin film transistors
title_fullStr Low temperature polycrystalline silicon thin films and thin film transistors
title_full_unstemmed Low temperature polycrystalline silicon thin films and thin film transistors
title_sort low temperature polycrystalline silicon thin films and thin film transistors
publishDate 2008
url https://hdl.handle.net/10356/4647
_version_ 1772827371346329600

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