Study of copper diffusion in tantalum based barrier materials

This thesis presents our findings on Cu diffusion into different potential barrier layers.

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Bibliographic Details
Main Author:	Loh, Seow Wee.
Other Authors:	Zhang, Dao Hua
Format:	Theses and Dissertations
Published:	2008
Subjects:	DRNTU::Engineering::Electrical and electronic engineering::Electric apparatus and materials
Online Access:	http://hdl.handle.net/10356/4794
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Institution:	Nanyang Technological University

id	sg-ntu-dr.10356-4794
record_format	dspace
spelling	sg-ntu-dr.10356-47942023-07-04T16:02:12Z Study of copper diffusion in tantalum based barrier materials Loh, Seow Wee. Zhang, Dao Hua School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering::Electric apparatus and materials This thesis presents our findings on Cu diffusion into different potential barrier layers. Doctor of Philosophy (EEE) 2008-09-17T09:58:49Z 2008-09-17T09:58:49Z 2004 2004 Thesis http://hdl.handle.net/10356/4794 Nanyang Technological University application/pdf
institution	Nanyang Technological University
building	NTU Library
continent	Asia
country	Singapore Singapore
content_provider	NTU Library
collection	DR-NTU
topic	DRNTU::Engineering::Electrical and electronic engineering::Electric apparatus and materials
spellingShingle	DRNTU::Engineering::Electrical and electronic engineering::Electric apparatus and materials Loh, Seow Wee. Study of copper diffusion in tantalum based barrier materials
description	This thesis presents our findings on Cu diffusion into different potential barrier layers.
author2	Zhang, Dao Hua
author_facet	Zhang, Dao Hua Loh, Seow Wee.
format	Theses and Dissertations
author	Loh, Seow Wee.
author_sort	Loh, Seow Wee.
title	Study of copper diffusion in tantalum based barrier materials
title_short	Study of copper diffusion in tantalum based barrier materials
title_full	Study of copper diffusion in tantalum based barrier materials
title_fullStr	Study of copper diffusion in tantalum based barrier materials
title_full_unstemmed	Study of copper diffusion in tantalum based barrier materials
title_sort	study of copper diffusion in tantalum based barrier materials
publishDate	2008
url	http://hdl.handle.net/10356/4794
_version_	1772828088396152832

Study of copper diffusion in tantalum based barrier materials

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