Carbon films deposition by filtered cathodic vacuum arc technique

• 主要作者: Tay, Beng Kang
• 其他作者: School of Electrical and Electronic Engineering
• 格式: Research Report
• 語言: English
• 出版: 2012
• 主題: DRNTU::Engineering::Electrical and electronic engineering::Microelectronics
• 在線閱讀: http://hdl.handle.net/10356/48031
• 機構: Nanyang Technological University

Thin carbon films have been deposited by filtered cathode vacuum arc technique and a low bias voltage power supply. The substrate bias voltage ranged from -80 to -400V. It is important for thin films to have low internal stress and good adhesive properties for any applications. The results ascertain...