Development of high dielectric constant SrTiO3 thin films

This thesis presents the effect of certain process conditions in the overall performance of SrTiO3 dielectric thin films deposited by Radio Frequency (RF) sputtering techniques.

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Bibliographic Details
Main Author:	Loo, Martin Chih Chien.
Other Authors:	Radhakrishnan, K.
Format:	Theses and Dissertations
Published:	2008
Subjects:	DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
Online Access:	http://hdl.handle.net/10356/4805
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Institution:	Nanyang Technological University

id	sg-ntu-dr.10356-4805
record_format	dspace
spelling	sg-ntu-dr.10356-48052023-07-04T15:43:27Z Development of high dielectric constant SrTiO3 thin films Loo, Martin Chih Chien. Radhakrishnan, K. School of Electrical and Electronic Engineering DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films This thesis presents the effect of certain process conditions in the overall performance of SrTiO3 dielectric thin films deposited by Radio Frequency (RF) sputtering techniques. Master of Engineering 2008-09-17T09:59:05Z 2008-09-17T09:59:05Z 2002 2002 Thesis http://hdl.handle.net/10356/4805 Nanyang Technological University application/pdf
institution	Nanyang Technological University
building	NTU Library
continent	Asia
country	Singapore Singapore
content_provider	NTU Library
collection	DR-NTU
topic	DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
spellingShingle	DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films Loo, Martin Chih Chien. Development of high dielectric constant SrTiO3 thin films
description	This thesis presents the effect of certain process conditions in the overall performance of SrTiO3 dielectric thin films deposited by Radio Frequency (RF) sputtering techniques.
author2	Radhakrishnan, K.
author_facet	Radhakrishnan, K. Loo, Martin Chih Chien.
format	Theses and Dissertations
author	Loo, Martin Chih Chien.
author_sort	Loo, Martin Chih Chien.
title	Development of high dielectric constant SrTiO3 thin films
title_short	Development of high dielectric constant SrTiO3 thin films
title_full	Development of high dielectric constant SrTiO3 thin films
title_fullStr	Development of high dielectric constant SrTiO3 thin films
title_full_unstemmed	Development of high dielectric constant SrTiO3 thin films
title_sort	development of high dielectric constant srtio3 thin films
publishDate	2008
url	http://hdl.handle.net/10356/4805
_version_	1772826503314145280

Development of high dielectric constant SrTiO3 thin films

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