Development of high dielectric constant SrTiO3 thin films
This thesis presents the effect of certain process conditions in the overall performance of SrTiO3 dielectric thin films deposited by Radio Frequency (RF) sputtering techniques.
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| Format: | Theses and Dissertations |
| Published: |
2008
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| Online Access: | http://hdl.handle.net/10356/4805 |
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| Institution: | Nanyang Technological University |