Electron cyclotron resonance (ECR) plasma etching study of GaAs and GaInP

This thesis presents the Electron Cyclotron Resonance (ECR) plasma etching of GaAs and Ga(0.52)In(0.48)P grown using Solid Source Molecular Beam Epitaxy (SSMBE) with a view of applying the process for future heterojunction bipolar transistors (HBTs) fabrication.

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Bibliographic Details
Main Author:	Ng, Tien Khee.
Other Authors:	Yoon, Soon Fatt
Format:	Theses and Dissertations
Published:	2008
Subjects:	DRNTU::Engineering::Electrical and electronic engineering::Electric apparatus and materials
Online Access:	http://hdl.handle.net/10356/4964
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Institution:	Nanyang Technological University

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spelling	sg-ntu-dr.10356-49642023-07-04T15:45:37Z Electron cyclotron resonance (ECR) plasma etching study of GaAs and GaInP Ng, Tien Khee. Yoon, Soon Fatt School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering::Electric apparatus and materials This thesis presents the Electron Cyclotron Resonance (ECR) plasma etching of GaAs and Ga(0.52)In(0.48)P grown using Solid Source Molecular Beam Epitaxy (SSMBE) with a view of applying the process for future heterojunction bipolar transistors (HBTs) fabrication. Master of Engineering 2008-09-17T10:02:20Z 2008-09-17T10:02:20Z 2001 2001 Thesis http://hdl.handle.net/10356/4964 Nanyang Technological University application/pdf
institution	Nanyang Technological University
building	NTU Library
continent	Asia
country	Singapore Singapore
content_provider	NTU Library
collection	DR-NTU
topic	DRNTU::Engineering::Electrical and electronic engineering::Electric apparatus and materials
spellingShingle	DRNTU::Engineering::Electrical and electronic engineering::Electric apparatus and materials Ng, Tien Khee. Electron cyclotron resonance (ECR) plasma etching study of GaAs and GaInP
description	This thesis presents the Electron Cyclotron Resonance (ECR) plasma etching of GaAs and Ga(0.52)In(0.48)P grown using Solid Source Molecular Beam Epitaxy (SSMBE) with a view of applying the process for future heterojunction bipolar transistors (HBTs) fabrication.
author2	Yoon, Soon Fatt
author_facet	Yoon, Soon Fatt Ng, Tien Khee.
format	Theses and Dissertations
author	Ng, Tien Khee.
author_sort	Ng, Tien Khee.
title	Electron cyclotron resonance (ECR) plasma etching study of GaAs and GaInP
title_short	Electron cyclotron resonance (ECR) plasma etching study of GaAs and GaInP
title_full	Electron cyclotron resonance (ECR) plasma etching study of GaAs and GaInP
title_fullStr	Electron cyclotron resonance (ECR) plasma etching study of GaAs and GaInP
title_full_unstemmed	Electron cyclotron resonance (ECR) plasma etching study of GaAs and GaInP
title_sort	electron cyclotron resonance (ecr) plasma etching study of gaas and gainp
publishDate	2008
url	http://hdl.handle.net/10356/4964
_version_	1772828754083577856

Electron cyclotron resonance (ECR) plasma etching study of GaAs and GaInP

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