Corrosion scrap reduction from AMT8330
In this report, the author writes on a project carried out in Chartered Semiconductor Mfg Ltd, which helps to reduce the scrapping of wafers due to corrosion of the metal interconnects.
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| Format: | Theses and Dissertations |
| Published: |
2008
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| Online Access: | http://hdl.handle.net/10356/4966 |
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| Institution: | Nanyang Technological University |
| Summary: | In this report, the author writes on a project carried out in Chartered Semiconductor Mfg Ltd, which helps to reduce the scrapping of wafers due to corrosion of the metal interconnects. |
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