Corrosion scrap reduction from AMT8330

In this report, the author writes on a project carried out in Chartered Semiconductor Mfg Ltd, which helps to reduce the scrapping of wafers due to corrosion of the metal interconnects.

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Bibliographic Details
Main Author:	Ng, Ti Koon.
Other Authors:	Prasad, Krishnamachar
Format:	Theses and Dissertations
Published:	2008
Subjects:	DRNTU::Engineering::Electrical and electronic engineering::Microelectronics
Online Access:	http://hdl.handle.net/10356/4966
Tags:	Add Tag No Tags, Be the first to tag this record!
Institution:	Nanyang Technological University

id	sg-ntu-dr.10356-4966
record_format	dspace
spelling	sg-ntu-dr.10356-49662023-07-04T16:26:58Z Corrosion scrap reduction from AMT8330 Ng, Ti Koon. Prasad, Krishnamachar School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering::Microelectronics In this report, the author writes on a project carried out in Chartered Semiconductor Mfg Ltd, which helps to reduce the scrapping of wafers due to corrosion of the metal interconnects. Master of Science (Microelectronics) 2008-09-17T10:02:22Z 2008-09-17T10:02:22Z 2002 2002 Thesis http://hdl.handle.net/10356/4966 Nanyang Technological University application/pdf
institution	Nanyang Technological University
building	NTU Library
continent	Asia
country	Singapore Singapore
content_provider	NTU Library
collection	DR-NTU
topic	DRNTU::Engineering::Electrical and electronic engineering::Microelectronics
spellingShingle	DRNTU::Engineering::Electrical and electronic engineering::Microelectronics Ng, Ti Koon. Corrosion scrap reduction from AMT8330
description	In this report, the author writes on a project carried out in Chartered Semiconductor Mfg Ltd, which helps to reduce the scrapping of wafers due to corrosion of the metal interconnects.
author2	Prasad, Krishnamachar
author_facet	Prasad, Krishnamachar Ng, Ti Koon.
format	Theses and Dissertations
author	Ng, Ti Koon.
author_sort	Ng, Ti Koon.
title	Corrosion scrap reduction from AMT8330
title_short	Corrosion scrap reduction from AMT8330
title_full	Corrosion scrap reduction from AMT8330
title_fullStr	Corrosion scrap reduction from AMT8330
title_full_unstemmed	Corrosion scrap reduction from AMT8330
title_sort	corrosion scrap reduction from amt8330
publishDate	2008
url	http://hdl.handle.net/10356/4966
_version_	1772825327666462720

Corrosion scrap reduction from AMT8330

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