Corrosion scrap reduction from AMT8330

In this report, the author writes on a project carried out in Chartered Semiconductor Mfg Ltd, which helps to reduce the scrapping of wafers due to corrosion of the metal interconnects.

Saved in:
Bibliographic Details
Main Author: Ng, Ti Koon.
Other Authors: Prasad, Krishnamachar
Format: Theses and Dissertations
Published: 2008
Subjects:
Online Access:http://hdl.handle.net/10356/4966
Tags: Add Tag
No Tags, Be the first to tag this record!
Institution: Nanyang Technological University