Corrosion scrap reduction from AMT8330

• Main Author: Ng, Ti Koon.
• Other Authors: Prasad, Krishnamachar
• Format: Theses and Dissertations
• Published: 2008
• Subjects: DRNTU::Engineering::Electrical and electronic engineering::Microelectronics
• Online Access: http://hdl.handle.net/10356/4966
• Institution: Nanyang Technological University

In this report, the author writes on a project carried out in Chartered Semiconductor Mfg Ltd, which helps to reduce the scrapping of wafers due to corrosion of the metal interconnects.