Design, fabrication and characterization of microelectromechanical resonators for chemical and biological applications

• Main Author: Amir Heidari
• Other Authors: Yong-Jin Yoon
• Format: Theses and Dissertations
• Language: English
• Published: 2012
• Subjects: DRNTU::Engineering::Mechanical engineering::Mechanics and dynamics; DRNTU::Engineering::Electrical and electronic engineering::Microelectromechanical systems
• Online Access: https://hdl.handle.net/10356/50732
• Institution: Nanyang Technological University

Mass sensors are commonly used for detecting explosives, nucleic acids, and proteins. In recent years, the use of micro- and nano-electromechanical system (MEMS/NEMS) resonators for mass sensing applications has been extensively explored. The mass sensitivity improvement issue has been addressed by...