Design, fabrication and characterization of microelectromechanical resonators for chemical and biological applications

• Main Author: Amir Heidari
• Other Authors: Yong-Jin Yoon
• Format: Theses and Dissertations
• Language: English
• Published: 2012
• Subjects: DRNTU::Engineering::Mechanical engineering::Mechanics and dynamics; DRNTU::Engineering::Electrical and electronic engineering::Microelectromechanical systems
• Online Access: https://hdl.handle.net/10356/50732
• Institution: Nanyang Technological University

Mass sensors are commonly used for detecting explosives, nucleic acids, and proteins. In recent years, the use of micro- and nano-electromechanical system (MEMS/NEMS) resonators for mass sensing applications has been extensively explored. The mass sensitivity improvement issue has been addressed by different research groups using different techniques such as NEMS resonators, high frequency quartz crystal microbalances (QCMs), surface acoustic waves (SAWs), and film bulk acoustic resonators (FBARs). The main objective of this work has been to improve the performance of microresonators as mass-sensitive biochemical sensors. In this study, two particular resonator types are designed, fabricated and their mass sensitivities characteristics are studied in both gaseous and liquid environments.