Design, fabrication and characterization of microelectromechanical resonators for chemical and biological applications

Design, fabrication and characterization of microelectromechanical resonators for chemical and biological applications

Mass sensors are commonly used for detecting explosives, nucleic acids, and proteins. In recent years, the use of micro- and nano-electromechanical system (MEMS/NEMS) resonators for mass sensing applications has been extensively explored. The mass sensitivity improvement issue has been addressed by...

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Bibliographic Details
Main Author: Amir Heidari
Other Authors: Yong-Jin Yoon
Format: Theses and Dissertations
Language:English
Published: 2012
Subjects:
DRNTU::Engineering::Mechanical engineering::Mechanics and dynamics
DRNTU::Engineering::Electrical and electronic engineering::Microelectromechanical systems
Online Access:https://hdl.handle.net/10356/50732
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Institution: Nanyang Technological University
Language: English
Description
Summary:Mass sensors are commonly used for detecting explosives, nucleic acids, and proteins. In recent years, the use of micro- and nano-electromechanical system (MEMS/NEMS) resonators for mass sensing applications has been extensively explored. The mass sensitivity improvement issue has been addressed by different research groups using different techniques such as NEMS resonators, high frequency quartz crystal microbalances (QCMs), surface acoustic waves (SAWs), and film bulk acoustic resonators (FBARs). The main objective of this work has been to improve the performance of microresonators as mass-sensitive biochemical sensors. In this study, two particular resonator types are designed, fabricated and their mass sensitivities characteristics are studied in both gaseous and liquid environments.

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