Design, fabrication and characterization of microelectromechanical resonators for chemical and biological applications
Mass sensors are commonly used for detecting explosives, nucleic acids, and proteins. In recent years, the use of micro- and nano-electromechanical system (MEMS/NEMS) resonators for mass sensing applications has been extensively explored. The mass sensitivity improvement issue has been addressed by...
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Main Author: | Amir Heidari |
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Other Authors: | Yong-Jin Yoon |
Format: | Theses and Dissertations |
Language: | English |
Published: |
2012
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Subjects: | |
Online Access: | https://hdl.handle.net/10356/50732 |
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Institution: | Nanyang Technological University |
Language: | English |
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