Simulation of thermal behavior of silica glass and silicon with pulse laser heating
This project made use of a 3D model to study the thermo behavior of silica glass and silicon material under Continuous wave laser annealing (cw LA). Two simulations were carried out to illustrate different scenarios, including static laser, rotating wafer with moving laser. Simulated result...
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Main Author: | Liu, Mojia. |
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Other Authors: | Su Haibin |
Format: | Final Year Project |
Language: | English |
Published: |
2013
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Subjects: | |
Online Access: | http://hdl.handle.net/10356/52252 |
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Institution: | Nanyang Technological University |
Language: | English |
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