FE modeling of MEMS microphone performance

FE modeling of MEMS microphone performance

The finite element method, ANSYS, was used to model and simulate the diaphragm. Both static and dynamic behaviors of corrugation diaphragm like mechanical sensitivity, natural frequency and deflection were analyzed using FEM. Circular, rectangular corrugated diaphragms were studied. Various factors...

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Main Author: Wu, Yuxing.
Other Authors: Lin, Rongming
Format: Theses and Dissertations
Published: 2008
Subjects:
DRNTU::Engineering::Manufacturing
Online Access:http://hdl.handle.net/10356/5412
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Institution: Nanyang Technological University
id sg-ntu-dr.10356-5412
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spelling sg-ntu-dr.10356-54122023-03-11T17:09:17Z FE modeling of MEMS microphone performance Wu, Yuxing. Lin, Rongming School of Mechanical and Production Engineering DRNTU::Engineering::Manufacturing The finite element method, ANSYS, was used to model and simulate the diaphragm. Both static and dynamic behaviors of corrugation diaphragm like mechanical sensitivity, natural frequency and deflection were analyzed using FEM. Circular, rectangular corrugated diaphragms were studied. Various factors that affect the performance like internal stress, corrugation depth, and diaphragm thickness were presented in Chapter 4. Master of Science (Precision Engineering) 2008-09-17T10:49:59Z 2008-09-17T10:49:59Z 2003 2003 Thesis http://hdl.handle.net/10356/5412 Nanyang Technological University application/pdf
institution Nanyang Technological University
building NTU Library
continent Asia
country Singapore
Singapore
content_provider NTU Library
collection DR-NTU
topic DRNTU::Engineering::Manufacturing
spellingShingle DRNTU::Engineering::Manufacturing
Wu, Yuxing.
FE modeling of MEMS microphone performance
description The finite element method, ANSYS, was used to model and simulate the diaphragm. Both static and dynamic behaviors of corrugation diaphragm like mechanical sensitivity, natural frequency and deflection were analyzed using FEM. Circular, rectangular corrugated diaphragms were studied. Various factors that affect the performance like internal stress, corrugation depth, and diaphragm thickness were presented in Chapter 4.
author2 Lin, Rongming
author_facet Lin, Rongming
Wu, Yuxing.
format Theses and Dissertations
author Wu, Yuxing.
author_sort Wu, Yuxing.
title FE modeling of MEMS microphone performance
title_short FE modeling of MEMS microphone performance
title_full FE modeling of MEMS microphone performance
title_fullStr FE modeling of MEMS microphone performance
title_full_unstemmed FE modeling of MEMS microphone performance
title_sort fe modeling of mems microphone performance
publishDate 2008
url http://hdl.handle.net/10356/5412
_version_ 1761782036626931712

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