FE modeling of MEMS microphone performance
The finite element method, ANSYS, was used to model and simulate the diaphragm. Both static and dynamic behaviors of corrugation diaphragm like mechanical sensitivity, natural frequency and deflection were analyzed using FEM. Circular, rectangular corrugated diaphragms were studied. Various factors...
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| Format: | Theses and Dissertations |
| Published: |
2008
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| Online Access: | http://hdl.handle.net/10356/5412 |
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| Institution: | Nanyang Technological University |