FE modeling of MEMS microphone performance
The finite element method, ANSYS, was used to model and simulate the diaphragm. Both static and dynamic behaviors of corrugation diaphragm like mechanical sensitivity, natural frequency and deflection were analyzed using FEM. Circular, rectangular corrugated diaphragms were studied. Various factors...
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sg-ntu-dr.10356-54122023-03-11T17:09:17Z FE modeling of MEMS microphone performance Wu, Yuxing. Lin, Rongming School of Mechanical and Production Engineering DRNTU::Engineering::Manufacturing The finite element method, ANSYS, was used to model and simulate the diaphragm. Both static and dynamic behaviors of corrugation diaphragm like mechanical sensitivity, natural frequency and deflection were analyzed using FEM. Circular, rectangular corrugated diaphragms were studied. Various factors that affect the performance like internal stress, corrugation depth, and diaphragm thickness were presented in Chapter 4. Master of Science (Precision Engineering) 2008-09-17T10:49:59Z 2008-09-17T10:49:59Z 2003 2003 Thesis http://hdl.handle.net/10356/5412 Nanyang Technological University application/pdf |
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Asia |
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Singapore Singapore |
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DRNTU::Engineering::Manufacturing Wu, Yuxing. FE modeling of MEMS microphone performance |
| description |
The finite element method, ANSYS, was used to model and simulate the diaphragm. Both static and dynamic behaviors of corrugation diaphragm like mechanical sensitivity, natural frequency and deflection were analyzed using FEM. Circular, rectangular corrugated diaphragms were studied. Various factors that affect the performance like internal stress, corrugation depth, and diaphragm thickness were presented in Chapter 4. |
| author2 |
Lin, Rongming |
| author_facet |
Lin, Rongming Wu, Yuxing. |
| format |
Theses and Dissertations |
| author |
Wu, Yuxing. |
| author_sort |
Wu, Yuxing. |
| title |
FE modeling of MEMS microphone performance |
| title_short |
FE modeling of MEMS microphone performance |
| title_full |
FE modeling of MEMS microphone performance |
| title_fullStr |
FE modeling of MEMS microphone performance |
| title_full_unstemmed |
FE modeling of MEMS microphone performance |
| title_sort |
fe modeling of mems microphone performance |
| publishDate |
2008 |
| url |
http://hdl.handle.net/10356/5412 |
| _version_ |
1761782036626931712 |