Development of condenser silicon microphones using deep RIE micromachining technology

During the last decade, extensive research work has been carried out to develop microphones on silicon wafers using semiconductor fabrication technology. These micromachined microphones have been proven to be attractive for volume and cost-sensitive applications such as hearing aids and surveillance...

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Bibliographic Details
Main Author: Xu, Cong.
Other Authors: Miao, Jianmin
Format: Theses and Dissertations
Published: 2008
Subjects:
Online Access:http://hdl.handle.net/10356/5427
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Institution: Nanyang Technological University
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Summary:During the last decade, extensive research work has been carried out to develop microphones on silicon wafers using semiconductor fabrication technology. These micromachined microphones have been proven to be attractive for volume and cost-sensitive applications such as hearing aids and surveillance devices where competition on a cost basis dominates.