Development of condenser silicon microphones using deep RIE micromachining technology

• Main Author: Xu, Cong.
• Other Authors: Miao, Jianmin
• Format: Theses and Dissertations
• Published: 2008
• Subjects: DRNTU::Engineering::Manufacturing
• Online Access: http://hdl.handle.net/10356/5427
• Institution: Nanyang Technological University

During the last decade, extensive research work has been carried out to develop microphones on silicon wafers using semiconductor fabrication technology. These micromachined microphones have been proven to be attractive for volume and cost-sensitive applications such as hearing aids and surveillance...