Development of condenser silicon microphones using deep RIE micromachining technology

Development of condenser silicon microphones using deep RIE micromachining technology

During the last decade, extensive research work has been carried out to develop microphones on silicon wafers using semiconductor fabrication technology. These micromachined microphones have been proven to be attractive for volume and cost-sensitive applications such as hearing aids and surveillance...

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Main Author: Xu, Cong.
Other Authors: Miao, Jianmin
Format: Theses and Dissertations
Published: 2008
Subjects:
DRNTU::Engineering::Manufacturing
Online Access:http://hdl.handle.net/10356/5427
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Institution: Nanyang Technological University
id sg-ntu-dr.10356-5427
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spelling sg-ntu-dr.10356-54272023-03-11T17:08:51Z Development of condenser silicon microphones using deep RIE micromachining technology Xu, Cong. Miao, Jianmin School of Mechanical and Production Engineering DRNTU::Engineering::Manufacturing During the last decade, extensive research work has been carried out to develop microphones on silicon wafers using semiconductor fabrication technology. These micromachined microphones have been proven to be attractive for volume and cost-sensitive applications such as hearing aids and surveillance devices where competition on a cost basis dominates. Master of Science (Precision Engineering) 2008-09-17T10:50:16Z 2008-09-17T10:50:16Z 2002 2002 Thesis http://hdl.handle.net/10356/5427 Nanyang Technological University application/pdf
institution Nanyang Technological University
building NTU Library
continent Asia
country Singapore
Singapore
content_provider NTU Library
collection DR-NTU
topic DRNTU::Engineering::Manufacturing
spellingShingle DRNTU::Engineering::Manufacturing
Xu, Cong.
Development of condenser silicon microphones using deep RIE micromachining technology
description During the last decade, extensive research work has been carried out to develop microphones on silicon wafers using semiconductor fabrication technology. These micromachined microphones have been proven to be attractive for volume and cost-sensitive applications such as hearing aids and surveillance devices where competition on a cost basis dominates.
author2 Miao, Jianmin
author_facet Miao, Jianmin
Xu, Cong.
format Theses and Dissertations
author Xu, Cong.
author_sort Xu, Cong.
title Development of condenser silicon microphones using deep RIE micromachining technology
title_short Development of condenser silicon microphones using deep RIE micromachining technology
title_full Development of condenser silicon microphones using deep RIE micromachining technology
title_fullStr Development of condenser silicon microphones using deep RIE micromachining technology
title_full_unstemmed Development of condenser silicon microphones using deep RIE micromachining technology
title_sort development of condenser silicon microphones using deep rie micromachining technology
publishDate 2008
url http://hdl.handle.net/10356/5427
_version_ 1761781934495629312

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