Wafer fabrication cycle time report

• Main Author: Cheng, Hao Fen.
• Other Authors: Shum Ping
• Format: Final Year Project
• Language: English
• Published: 2013
• Subjects: DRNTU::Engineering::Electrical and electronic engineering::Semiconductors
• Online Access: http://hdl.handle.net/10356/54511
• Institution: Nanyang Technological University

Wafer Fabrication Process is the starting point of making any integrated circuit (IC) products and is a complex process which goes through more than 900 operational steps before shipping for assembly and test. This makes the control of wafer fabrication process very challenging and the results can be very encouraging. Cycle time is the elapsed time from the releasing of blank silicon wafers into the fabrication process until completion of fabrication on those wafers, which is the key parameter to monitor and control the wafer fabrication process. In this project we are focusing on the wafer fabrication cycle time report Autobahn Report, which calculates and estimates the cycle time categorized by work shift and work weight based on real time production data. In addition to providing more accurate circle time by employing improved calculation algorithm, Autobahn report also allows to keep track of circle time by tagging into different type of wafers for different purposes. Lastly it highlights the variance of the real step cycle time and target step cycle time to monitor the bottleneck of the fabrication process. The presentation of this dissertation is based on the waterfall model in the sequential order of report analysis, report design, implementation and conclusion.