Wafer fabrication cycle time report

• Main Author: Cheng, Hao Fen.
• Other Authors: Shum Ping
• Format: Final Year Project
• Language: English
• Published: 2013
• Subjects: DRNTU::Engineering::Electrical and electronic engineering::Semiconductors
• Online Access: http://hdl.handle.net/10356/54511
• Institution: Nanyang Technological University

Wafer Fabrication Process is the starting point of making any integrated circuit (IC) products and is a complex process which goes through more than 900 operational steps before shipping for assembly and test. This makes the control of wafer fabrication process very challenging and the results can b...