Preparation of shape-memory-alloy thin film for actuator

Preparation of shape-memory-alloy thin film for actuator

NiTiCu thin films have been successfully prepared through NiTi alloy target and pure copper target. Film composition, microstructure, crystallization, phase transformation behavior, residual stress and lattice parameter of the TiNiCu films were investigated.

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Bibliographic Details
Main Author: Zhang, Cengling
Other Authors: Du, Hejun
Format: Theses and Dissertations
Published: 2008
Subjects:
DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
Online Access:http://hdl.handle.net/10356/5513
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Institution: Nanyang Technological University
Description
Summary:NiTiCu thin films have been successfully prepared through NiTi alloy target and pure copper target. Film composition, microstructure, crystallization, phase transformation behavior, residual stress and lattice parameter of the TiNiCu films were investigated.

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