Preparation of shape-memory-alloy thin film for actuator

NiTiCu thin films have been successfully prepared through NiTi alloy target and pure copper target. Film composition, microstructure, crystallization, phase transformation behavior, residual stress and lattice parameter of the TiNiCu films were investigated.

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Bibliographic Details
Main Author:	Zhang, Cengling
Other Authors:	Du, Hejun
Format:	Theses and Dissertations
Published:	2008
Subjects:	DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
Online Access:	http://hdl.handle.net/10356/5513
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Institution:	Nanyang Technological University

id	sg-ntu-dr.10356-5513
record_format	dspace
spelling	sg-ntu-dr.10356-55132023-03-11T16:58:11Z Preparation of shape-memory-alloy thin film for actuator Zhang, Cengling Du, Hejun School of Mechanical and Production Engineering DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films NiTiCu thin films have been successfully prepared through NiTi alloy target and pure copper target. Film composition, microstructure, crystallization, phase transformation behavior, residual stress and lattice parameter of the TiNiCu films were investigated. Master of Science (Precision Engineering) 2008-09-17T10:52:25Z 2008-09-17T10:52:25Z 2001 2001 Thesis http://hdl.handle.net/10356/5513 Nanyang Technological University application/pdf
institution	Nanyang Technological University
building	NTU Library
continent	Asia
country	Singapore Singapore
content_provider	NTU Library
collection	DR-NTU
topic	DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
spellingShingle	DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films Zhang, Cengling Preparation of shape-memory-alloy thin film for actuator
description	NiTiCu thin films have been successfully prepared through NiTi alloy target and pure copper target. Film composition, microstructure, crystallization, phase transformation behavior, residual stress and lattice parameter of the TiNiCu films were investigated.
author2	Du, Hejun
author_facet	Du, Hejun Zhang, Cengling
format	Theses and Dissertations
author	Zhang, Cengling
author_sort	Zhang, Cengling
title	Preparation of shape-memory-alloy thin film for actuator
title_short	Preparation of shape-memory-alloy thin film for actuator
title_full	Preparation of shape-memory-alloy thin film for actuator
title_fullStr	Preparation of shape-memory-alloy thin film for actuator
title_full_unstemmed	Preparation of shape-memory-alloy thin film for actuator
title_sort	preparation of shape-memory-alloy thin film for actuator
publishDate	2008
url	http://hdl.handle.net/10356/5513
_version_	1761781552083107840

Preparation of shape-memory-alloy thin film for actuator

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