Dynamic bias-temperature instability study of metal/high-K gate stacks
In summary, a systematic study on the dynamic BTI of the metal/high-k gate stacks is conducted. The evolution of the switching oxide traps under the NBT and PBT stressing are compared and the possible oxygen defect framework is proposed. The frequency dependence of the BTI recovery is also examin...
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sg-ntu-dr.10356-555832023-07-04T15:35:48Z Dynamic bias-temperature instability study of metal/high-K gate stacks Gao, Yuan Ang Diing Shenp School of Electrical and Electronic Engineering DRNTU::Engineering In summary, a systematic study on the dynamic BTI of the metal/high-k gate stacks is conducted. The evolution of the switching oxide traps under the NBT and PBT stressing are compared and the possible oxygen defect framework is proposed. The frequency dependence of the BTI recovery is also examined. Implications of these new experimental observations on the device reliability assessment and modeling are discussed. Doctor of Philosophy (EEE) 2014-03-17T11:18:11Z 2014-03-17T11:18:11Z 2014 2014 Thesis Gao, Y. (2014). Dynamic bias-temperature instability study of metal/high-K gate stacks. Doctoral thesis, Nanyang Technological University, Singapore. http://hdl.handle.net/10356/55583 en 204 p. application/pdf |
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Nanyang Technological University |
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Asia |
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Singapore Singapore |
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English |
| topic |
DRNTU::Engineering |
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DRNTU::Engineering Gao, Yuan Dynamic bias-temperature instability study of metal/high-K gate stacks |
| description |
In summary, a systematic study on the dynamic BTI of the metal/high-k gate stacks is
conducted. The evolution of the switching oxide traps under the NBT and PBT
stressing are compared and the possible oxygen defect framework is proposed. The
frequency dependence of the BTI recovery is also examined. Implications of these
new experimental observations on the device reliability assessment and modeling are
discussed. |
| author2 |
Ang Diing Shenp |
| author_facet |
Ang Diing Shenp Gao, Yuan |
| format |
Theses and Dissertations |
| author |
Gao, Yuan |
| author_sort |
Gao, Yuan |
| title |
Dynamic bias-temperature instability study of metal/high-K gate stacks |
| title_short |
Dynamic bias-temperature instability study of metal/high-K gate stacks |
| title_full |
Dynamic bias-temperature instability study of metal/high-K gate stacks |
| title_fullStr |
Dynamic bias-temperature instability study of metal/high-K gate stacks |
| title_full_unstemmed |
Dynamic bias-temperature instability study of metal/high-K gate stacks |
| title_sort |
dynamic bias-temperature instability study of metal/high-k gate stacks |
| publishDate |
2014 |
| url |
http://hdl.handle.net/10356/55583 |
| _version_ |
1772826462587453440 |