Development of a micro-accretion process for three dimensional structures
The development of Microelectromechanical Systems has initiated the birth of various types of micro fabrication processes. These processes in turn serve as a platform for the invention of newer improved processes with increasingly higher fabrication resolution. This work reports on an investigative...
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| Format: | Theses and Dissertations |
| Published: |
2008
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| Online Access: | http://hdl.handle.net/10356/5634 |
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| Institution: | Nanyang Technological University |