Large surface profile measurement with instantaneous phase shifting interferometry

• المؤلف الرئيسي: Hui, Wei Kee.
• مؤلفون آخرون: Ngoi, Bryan Kok Ann
• التنسيق: Theses and Dissertations
• منشور في: 2008
• الموضوعات: DRNTU::Engineering::Manufacturing::Metrology
• الوصول للمادة أونلاين: http://hdl.handle.net/10356/5813

In this research, an optical layout that uses the concept of array of points with a modified Michelson interferometer has been proposed. With this setup, a relatively large surface area can be measured without the need for time consuming scanning. In combination with instantaneous phase shifting arr...