Stress evaluation in thin films

• Main Author: Lalita Varma P. V. S. N.
• Other Authors: Ramamurthy, Upadrasta
• Format: Theses and Dissertations
• Published: 2008
• Subjects: DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
• Online Access: http://hdl.handle.net/10356/5925
• Institution: Nanyang Technological University

We are in the midst of a major technology transition from alumni to copper as the metallization material. In the present study, a comprehensive examination of the change in the stress state due to this technology transition has been made, which is done by repeating the experiments that were done on...