Analysis, scheduling and planning in wafer fabrication systems
The purpose of this project is to improve wafer fabrication efficiency by providing insights to wafer fabrication facility (fab) operation. Specifically, the authors are working on the analysis, planning and scheduling of the wafer fabrication system for Chartered Semiconductor Manufacturing Limited...
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| Online Access: | http://hdl.handle.net/10356/60651 |
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sg-ntu-dr.10356-606512020-11-01T11:31:45Z Analysis, scheduling and planning in wafer fabrication systems Citra Pramesti Toh, Kai Aik Zhang, Bo Yoon Soon Fatt School of Electrical and Electronic Engineering Singapore-MIT Alliance Programme DRNTU::Engineering::Manufacturing The purpose of this project is to improve wafer fabrication efficiency by providing insights to wafer fabrication facility (fab) operation. Specifically, the authors are working on the analysis, planning and scheduling of the wafer fabrication system for Chartered Semiconductor Manufacturing Limited. The three individual themes are closely interlinked with emphasis on the operational planning of the fab. Master of Science (IMST) 2014-05-29T03:45:40Z 2014-05-29T03:45:40Z 2004 2004 Thesis http://hdl.handle.net/10356/60651 en 119 p. application/pdf |
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Singapore Singapore |
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DRNTU::Engineering::Manufacturing |
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DRNTU::Engineering::Manufacturing Citra Pramesti Toh, Kai Aik Zhang, Bo Analysis, scheduling and planning in wafer fabrication systems |
| description |
The purpose of this project is to improve wafer fabrication efficiency by providing insights to wafer fabrication facility (fab) operation. Specifically, the authors are working on the analysis, planning and scheduling of the wafer fabrication system for Chartered Semiconductor Manufacturing Limited. The three individual themes are closely interlinked with emphasis on the operational planning of the fab. |
| author2 |
Yoon Soon Fatt |
| author_facet |
Yoon Soon Fatt Citra Pramesti Toh, Kai Aik Zhang, Bo |
| format |
Theses and Dissertations |
| author |
Citra Pramesti Toh, Kai Aik Zhang, Bo |
| author_sort |
Citra Pramesti |
| title |
Analysis, scheduling and planning in wafer fabrication systems |
| title_short |
Analysis, scheduling and planning in wafer fabrication systems |
| title_full |
Analysis, scheduling and planning in wafer fabrication systems |
| title_fullStr |
Analysis, scheduling and planning in wafer fabrication systems |
| title_full_unstemmed |
Analysis, scheduling and planning in wafer fabrication systems |
| title_sort |
analysis, scheduling and planning in wafer fabrication systems |
| publishDate |
2014 |
| url |
http://hdl.handle.net/10356/60651 |
| _version_ |
1688665420839518208 |