Analysis, scheduling and planning in wafer fabrication systems
The purpose of this project is to improve wafer fabrication efficiency by providing insights to wafer fabrication facility (fab) operation. Specifically, the authors are working on the analysis, planning and scheduling of the wafer fabrication system for Chartered Semiconductor Manufacturing Limited...
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| Main Authors: | , , |
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| Other Authors: | |
| Format: | Theses and Dissertations |
| Language: | English |
| Published: |
2014
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| Subjects: | |
| Online Access: | http://hdl.handle.net/10356/60651 |
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| Institution: | Nanyang Technological University |
| Language: | English |