Analysis, scheduling and planning in wafer fabrication systems

Analysis, scheduling and planning in wafer fabrication systems

The purpose of this project is to improve wafer fabrication efficiency by providing insights to wafer fabrication facility (fab) operation. Specifically, the authors are working on the analysis, planning and scheduling of the wafer fabrication system for Chartered Semiconductor Manufacturing Limited...

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書目詳細資料
Main Authors:	Citra Pramesti, Toh, Kai Aik, Zhang, Bo
其他作者:	Yoon Soon Fatt
格式:	Theses and Dissertations
語言:	English
出版:	2014
主題:	DRNTU::Engineering::Manufacturing
在線閱讀:	http://hdl.handle.net/10356/60651
標簽:	添加標簽沒有標簽, 成為第一個標記此記錄!

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