Analysis, scheduling and planning in wafer fabrication systems

• المؤلفون الرئيسيون: Citra Pramesti, Toh, Kai Aik, Zhang, Bo
• مؤلفون آخرون: Yoon Soon Fatt
• التنسيق: Theses and Dissertations
• اللغة: English
• منشور في: 2014
• الموضوعات: DRNTU::Engineering::Manufacturing
• الوصول للمادة أونلاين: http://hdl.handle.net/10356/60651

The purpose of this project is to improve wafer fabrication efficiency by providing insights to wafer fabrication facility (fab) operation. Specifically, the authors are working on the analysis, planning and scheduling of the wafer fabrication system for Chartered Semiconductor Manufacturing Limited...