Micro-machining of silicon and metals using femtosecond laser

The objective of this project is to investigate the application of femtosecond lasers to micromachining. Specifically, the effects of the femtosecond laser on silicon and metals will be explored. Two specific applications will be considered in this investigation, they are the dicing of silicon wafer...

Full description

Saved in:
Bibliographic Details
Main Authors: Koh, Wee Leong, Wang, Lei, Wong, Thai Yuan, Zhang, Yilei
Other Authors: Lam Yee Cheong
Format: Theses and Dissertations
Language:English
Published: 2014
Subjects:
Online Access:http://hdl.handle.net/10356/60696
Tags: Add Tag
No Tags, Be the first to tag this record!
Institution: Nanyang Technological University
Language: English
id sg-ntu-dr.10356-60696
record_format dspace
spelling sg-ntu-dr.10356-606962020-11-01T11:33:22Z Micro-machining of silicon and metals using femtosecond laser Koh, Wee Leong Wang, Lei Wong, Thai Yuan Zhang, Yilei Lam Yee Cheong School of Mechanical and Aerospace Engineering Singapore-MIT Alliance Programme DRNTU::Engineering::Manufacturing The objective of this project is to investigate the application of femtosecond lasers to micromachining. Specifically, the effects of the femtosecond laser on silicon and metals will be explored. Two specific applications will be considered in this investigation, they are the dicing of silicon wafers and manufacturing of metallic stents. The work done includes the optimization of the laser cutting process and an investigation of the key effects. A simulation of the laser cutting process on silicon was developed. The machining of a planer stent pattern using the femtosecond laser was also carried out. ​Master of Science (IMST) 2014-05-29T06:13:00Z 2014-05-29T06:13:00Z 2002 2002 Thesis http://hdl.handle.net/10356/60696 en 179 p. application/pdf
institution Nanyang Technological University
building NTU Library
continent Asia
country Singapore
Singapore
content_provider NTU Library
collection DR-NTU
language English
topic DRNTU::Engineering::Manufacturing
spellingShingle DRNTU::Engineering::Manufacturing
Koh, Wee Leong
Wang, Lei
Wong, Thai Yuan
Zhang, Yilei
Micro-machining of silicon and metals using femtosecond laser
description The objective of this project is to investigate the application of femtosecond lasers to micromachining. Specifically, the effects of the femtosecond laser on silicon and metals will be explored. Two specific applications will be considered in this investigation, they are the dicing of silicon wafers and manufacturing of metallic stents. The work done includes the optimization of the laser cutting process and an investigation of the key effects. A simulation of the laser cutting process on silicon was developed. The machining of a planer stent pattern using the femtosecond laser was also carried out.
author2 Lam Yee Cheong
author_facet Lam Yee Cheong
Koh, Wee Leong
Wang, Lei
Wong, Thai Yuan
Zhang, Yilei
format Theses and Dissertations
author Koh, Wee Leong
Wang, Lei
Wong, Thai Yuan
Zhang, Yilei
author_sort Koh, Wee Leong
title Micro-machining of silicon and metals using femtosecond laser
title_short Micro-machining of silicon and metals using femtosecond laser
title_full Micro-machining of silicon and metals using femtosecond laser
title_fullStr Micro-machining of silicon and metals using femtosecond laser
title_full_unstemmed Micro-machining of silicon and metals using femtosecond laser
title_sort micro-machining of silicon and metals using femtosecond laser
publishDate 2014
url http://hdl.handle.net/10356/60696
_version_ 1688665546236624896