Micro-machining of silicon and metals using femtosecond laser

• Main Authors: Koh, Wee Leong, Wang, Lei, Wong, Thai Yuan, Zhang, Yilei
• Other Authors: Lam Yee Cheong
• Format: Theses and Dissertations
• Language: English
• Published: 2014
• Subjects: DRNTU::Engineering::Manufacturing
• Online Access: http://hdl.handle.net/10356/60696
• Institution: Nanyang Technological University

The objective of this project is to investigate the application of femtosecond lasers to micromachining. Specifically, the effects of the femtosecond laser on silicon and metals will be explored. Two specific applications will be considered in this investigation, they are the dicing of silicon wafer...