Tape casting of dielectric ALN substrate for microelectronic applications

The objective of thois project was to develop high performance dielectric AIN multilayered substrate for microelectronics applications using cost-effective starting powders, to obtain a combination of low dielectric constant and reduced density with an improved thermal conductivity, closer CTE match...

Full description

Saved in:
Bibliographic Details
Main Author: Long, Yi.
Other Authors: Yeong, Hin Yuen
Format: Theses and Dissertations
Published: 2008
Subjects:
Online Access:http://hdl.handle.net/10356/6100
Tags: Add Tag
No Tags, Be the first to tag this record!
Institution: Nanyang Technological University
Description
Summary:The objective of thois project was to develop high performance dielectric AIN multilayered substrate for microelectronics applications using cost-effective starting powders, to obtain a combination of low dielectric constant and reduced density with an improved thermal conductivity, closer CTE match with silicon and high mechanical strength.