Tape casting of dielectric ALN substrate for microelectronic applications

• المؤلف الرئيسي: Long, Yi.
• مؤلفون آخرون: Yeong, Hin Yuen
• التنسيق: Theses and Dissertations
• منشور في: 2008
• الموضوعات: DRNTU::Engineering::Mechanical engineering::Mechatronics
• الوصول للمادة أونلاين: http://hdl.handle.net/10356/6100
• المؤسسة: Nanyang Technological University

The objective of thois project was to develop high performance dielectric AIN multilayered substrate for microelectronics applications using cost-effective starting powders, to obtain a combination of low dielectric constant and reduced density with an improved thermal conductivity, closer CTE match...