Tape casting of dielectric ALN substrate for microelectronic applications

• Main Author: Long, Yi.
• Other Authors: Yeong, Hin Yuen
• Format: Theses and Dissertations
• Published: 2008
• Subjects: DRNTU::Engineering::Mechanical engineering::Mechatronics
• Online Access: http://hdl.handle.net/10356/6100
• Institution: Nanyang Technological University

The objective of thois project was to develop high performance dielectric AIN multilayered substrate for microelectronics applications using cost-effective starting powders, to obtain a combination of low dielectric constant and reduced density with an improved thermal conductivity, closer CTE match...