Tape casting of dielectric ALN substrate for microelectronic applications

The objective of thois project was to develop high performance dielectric AIN multilayered substrate for microelectronics applications using cost-effective starting powders, to obtain a combination of low dielectric constant and reduced density with an improved thermal conductivity, closer CTE match...

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Main Author: Long, Yi.
Other Authors: Yeong, Hin Yuen
Format: Theses and Dissertations
Published: 2008
Subjects:
Online Access:http://hdl.handle.net/10356/6100
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Institution: Nanyang Technological University
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spelling sg-ntu-dr.10356-61002023-03-11T17:23:47Z Tape casting of dielectric ALN substrate for microelectronic applications Long, Yi. Yeong, Hin Yuen School of Mechanical and Production Engineering DRNTU::Engineering::Mechanical engineering::Mechatronics The objective of thois project was to develop high performance dielectric AIN multilayered substrate for microelectronics applications using cost-effective starting powders, to obtain a combination of low dielectric constant and reduced density with an improved thermal conductivity, closer CTE match with silicon and high mechanical strength. Master of Engineering (MPE) 2008-09-17T11:06:45Z 2008-09-17T11:06:45Z 2001 2001 Thesis http://hdl.handle.net/10356/6100 Nanyang Technological University application/pdf
institution Nanyang Technological University
building NTU Library
continent Asia
country Singapore
Singapore
content_provider NTU Library
collection DR-NTU
topic DRNTU::Engineering::Mechanical engineering::Mechatronics
spellingShingle DRNTU::Engineering::Mechanical engineering::Mechatronics
Long, Yi.
Tape casting of dielectric ALN substrate for microelectronic applications
description The objective of thois project was to develop high performance dielectric AIN multilayered substrate for microelectronics applications using cost-effective starting powders, to obtain a combination of low dielectric constant and reduced density with an improved thermal conductivity, closer CTE match with silicon and high mechanical strength.
author2 Yeong, Hin Yuen
author_facet Yeong, Hin Yuen
Long, Yi.
format Theses and Dissertations
author Long, Yi.
author_sort Long, Yi.
title Tape casting of dielectric ALN substrate for microelectronic applications
title_short Tape casting of dielectric ALN substrate for microelectronic applications
title_full Tape casting of dielectric ALN substrate for microelectronic applications
title_fullStr Tape casting of dielectric ALN substrate for microelectronic applications
title_full_unstemmed Tape casting of dielectric ALN substrate for microelectronic applications
title_sort tape casting of dielectric aln substrate for microelectronic applications
publishDate 2008
url http://hdl.handle.net/10356/6100
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