Tape casting of dielectric ALN substrate for microelectronic applications
The objective of thois project was to develop high performance dielectric AIN multilayered substrate for microelectronics applications using cost-effective starting powders, to obtain a combination of low dielectric constant and reduced density with an improved thermal conductivity, closer CTE match...
Saved in:
Main Author: | |
---|---|
Other Authors: | |
Format: | Theses and Dissertations |
Published: |
2008
|
Subjects: | |
Online Access: | http://hdl.handle.net/10356/6100 |
Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Institution: | Nanyang Technological University |
id |
sg-ntu-dr.10356-6100 |
---|---|
record_format |
dspace |
spelling |
sg-ntu-dr.10356-61002023-03-11T17:23:47Z Tape casting of dielectric ALN substrate for microelectronic applications Long, Yi. Yeong, Hin Yuen School of Mechanical and Production Engineering DRNTU::Engineering::Mechanical engineering::Mechatronics The objective of thois project was to develop high performance dielectric AIN multilayered substrate for microelectronics applications using cost-effective starting powders, to obtain a combination of low dielectric constant and reduced density with an improved thermal conductivity, closer CTE match with silicon and high mechanical strength. Master of Engineering (MPE) 2008-09-17T11:06:45Z 2008-09-17T11:06:45Z 2001 2001 Thesis http://hdl.handle.net/10356/6100 Nanyang Technological University application/pdf |
institution |
Nanyang Technological University |
building |
NTU Library |
continent |
Asia |
country |
Singapore Singapore |
content_provider |
NTU Library |
collection |
DR-NTU |
topic |
DRNTU::Engineering::Mechanical engineering::Mechatronics |
spellingShingle |
DRNTU::Engineering::Mechanical engineering::Mechatronics Long, Yi. Tape casting of dielectric ALN substrate for microelectronic applications |
description |
The objective of thois project was to develop high performance dielectric AIN multilayered substrate for microelectronics applications using cost-effective starting powders, to obtain a combination of low dielectric constant and reduced density with an improved thermal conductivity, closer CTE match with silicon and high mechanical strength. |
author2 |
Yeong, Hin Yuen |
author_facet |
Yeong, Hin Yuen Long, Yi. |
format |
Theses and Dissertations |
author |
Long, Yi. |
author_sort |
Long, Yi. |
title |
Tape casting of dielectric ALN substrate for microelectronic applications |
title_short |
Tape casting of dielectric ALN substrate for microelectronic applications |
title_full |
Tape casting of dielectric ALN substrate for microelectronic applications |
title_fullStr |
Tape casting of dielectric ALN substrate for microelectronic applications |
title_full_unstemmed |
Tape casting of dielectric ALN substrate for microelectronic applications |
title_sort |
tape casting of dielectric aln substrate for microelectronic applications |
publishDate |
2008 |
url |
http://hdl.handle.net/10356/6100 |
_version_ |
1761781499219148800 |