Development of a novel filtered cathodic vacuum arc deposition system for carbon metal nanocluster thin films

• Main Author: Xu, Naiyun
• Other Authors: Tay Beng Kang
• Format: Theses and Dissertations
• Language: English
• Published: 2014
• Subjects: DRNTU::Engineering::Electrical and electronic engineering::Nanoelectronics
• Online Access: https://hdl.handle.net/10356/61041
• Institution: Nanyang Technological University

Carbon metal nanocluster (C:Me) films have been used to protect the metal nanoclusters from oxidation and enhance its properties, in the same time the incorporation of metal nanoclusters within the carbon thin film is also able to reduce the high compressive stress of the carbon film, improve its me...