Atomistic simulation study of high-κ oxide defects for understanding gate stack and RRAM reliability
High-κ Oxide Defects in the MOSFET gate stack and RRAM cell severely impact the device reliability. In this work, we conducted first-principles modeling and simulation to investigate BTI performance in the SiON, HfO2 and La doped HfO2 MOSFET gate stacks. The properties of VO, Oi and VO-Oi defect pai...
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sg-ntu-dr.10356-622242023-07-04T16:31:00Z Atomistic simulation study of high-κ oxide defects for understanding gate stack and RRAM reliability Gu, Chenjie Ang Diing Shenp School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering::Microelectronics High-κ Oxide Defects in the MOSFET gate stack and RRAM cell severely impact the device reliability. In this work, we conducted first-principles modeling and simulation to investigate BTI performance in the SiON, HfO2 and La doped HfO2 MOSFET gate stacks. The properties of VO, Oi and VO-Oi defect pair are studied, and unique behaviors of these defects which attribute to the BTI degradation in the aforementioned device gate stack are presented. Thereafter, the understanding of the defects in the hafnium oxide is extended to the RRAM study. We exhibit the key role of the forming step in generating the switchable conductive filament, and meanwhile an alternative method by using of Pt as the bottom electrode to mediate the conductive filament generation is introduced. DOCTOR OF PHILOSOPHY (EEE) 2015-03-09T07:26:22Z 2015-03-09T07:26:22Z 2015 2015 Thesis Gu, C. (2015). Atomistic simulation study of high-κ oxide defects for understanding gate stack and RRAM reliability. Doctoral thesis, Nanyang Technological University, Singapore. https://hdl.handle.net/10356/62224 10.32657/10356/62224 en 238 p. application/pdf |
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DRNTU::Engineering::Electrical and electronic engineering::Microelectronics Gu, Chenjie Atomistic simulation study of high-κ oxide defects for understanding gate stack and RRAM reliability |
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High-κ Oxide Defects in the MOSFET gate stack and RRAM cell severely impact the device reliability. In this work, we conducted first-principles modeling and simulation to investigate BTI performance in the SiON, HfO2 and La doped HfO2 MOSFET gate stacks. The properties of VO, Oi and VO-Oi defect pair are studied, and unique behaviors of these defects which attribute to the BTI degradation in the aforementioned device gate stack are presented. Thereafter, the understanding of the defects in the hafnium oxide is extended to the RRAM study. We exhibit the key role of the forming step in generating the switchable conductive filament, and meanwhile an alternative method by using of Pt as the bottom electrode to mediate the conductive filament generation is introduced. |
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Ang Diing Shenp |
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Ang Diing Shenp Gu, Chenjie |
format |
Theses and Dissertations |
author |
Gu, Chenjie |
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Gu, Chenjie |
title |
Atomistic simulation study of high-κ oxide defects for understanding gate stack and RRAM reliability |
title_short |
Atomistic simulation study of high-κ oxide defects for understanding gate stack and RRAM reliability |
title_full |
Atomistic simulation study of high-κ oxide defects for understanding gate stack and RRAM reliability |
title_fullStr |
Atomistic simulation study of high-κ oxide defects for understanding gate stack and RRAM reliability |
title_full_unstemmed |
Atomistic simulation study of high-κ oxide defects for understanding gate stack and RRAM reliability |
title_sort |
atomistic simulation study of high-κ oxide defects for understanding gate stack and rram reliability |
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2015 |
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https://hdl.handle.net/10356/62224 |
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1772825642437443584 |